About: http://webisa.webdatacommons.org/300406006

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An inorganic insulating film mainly containing silicon may be used for the second interlayer insulating film 155.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com