About: http://webisa.webdatacommons.org/300506401

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In order to manufacture the lab-on-a chip, the researchers used much the same lithography, etching and other manufacturing process steps as they do for semiconductor production, Gervais explained.
http://www.w3.org/ns/prov#wasQuotedFrom	eetimes.com