About: http://webisa.webdatacommons.org/300535061

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In particular, the excimer lasers such as KrF (248 nm), ArF (193 nm) and F2 (157 nm) are advantageously utilized.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com