About: http://webisa.webdatacommons.org/300707093

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Such materials should also be compatible with the process gases and other chemicals, such as cleaning chemicals (e.g., NF3) that may be introduced into chamber 1490.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com