About: http://webisa.webdatacommons.org/300851806

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A gas such as silane (SiH4) or TEOS (tetra-ethoxy-silane) may be used as a source gas for the silicon oxide film 12.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com