About: http://webisa.webdatacommons.org/301058972

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Dielectric layer 130 may include an oxide, such as silicon oxide, Aluminum oxide or silicon oxy-nitride.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com