About: http://webisa.webdatacommons.org/301107546

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 4 is a flow chart showing a process for fabricating a stacked semiconductor device of Embodiment 1;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com