About: http://webisa.webdatacommons.org/301168008

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7 is a plan view illustrating the formation of cell 100 after the etching of polysilicon layer 152.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com