About: http://webisa.webdatacommons.org/301254338

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	From equation (5) above, it is evident that the shorter the time T to scan along a sweep such as 50, the shorter will be the time required to scan the entire wafer and therefore the higher the throughput.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com