| http://www.w3.org/ns/prov#value | - Patent US6869335 - Retaining rings, planarizing apparatuses including retaining rings, and ... - Google PatentsSearch Images Maps Play YouTube News Gmail Drive More ??Sign inAdvanced Patent SearchPatentsRetaining rings, planarizing apparatuses including retaining rings, and methods for mechanical and/or chemical-mechanical planarization of micro-device workpieces are disclosed herein.
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