About: http://webisa.webdatacommons.org/301657388

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	as is used such that anisotropy etching and isotropic etching are available by setting conditions, such as applied power and gas pressure.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com