| http://www.w3.org/ns/prov#value | - The contact holes for exposing the source regions of the first and second active regions are formed in such a manner that the third oxide layer is formed on the overall surface of the substrate including the contact plugs, and portions of the third oxide layer, second oxide layer, second ferroelectric layer, first ferroelectric layer, planarizing insulation layer and first oxide layer, placed on t
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