About: http://webisa.webdatacommons.org/302153360

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The pressure inside the chamber can be pulsed to improve mass transfer and to also improve the ???throwing power??? of the aluminum deposition process into holes, channels, grooves, or other zones where vapor access may be restricted.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au