| http://www.w3.org/ns/prov#value | - The sensor unit senses, collects and/or detects the aerial image produced or generated by the test mask???lithographic equipment in order to measure, inspect, and/or characterize the performance of the optical sub-system of the lithographic equipment. [0056] In another aspect, the present invention is a technique of, and imaging system and sensor for generating or producing the same or substantial
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