About: http://webisa.webdatacommons.org/30247903

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Embodiments of the present invention comprise forming the first and second sidewall spacers from a dielectric material, such as a silicon oxide, a silicon nitride or a silicon oxynitride.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com