| http://www.w3.org/ns/prov#value | - A material especially suitable for the barrier metal is any of TaN, Ta, WN, TiW, WSi, TiSi, MoSi, Mo, Cr, TiN and TiSiN. When the barrier metal is selected from the materials recited above, it is particularly preferable to use as a constituent material of the first electrode layer at least one oxide selected from ITO, IZO, SnO2, ATO, ZnO, TiO2 or FTO.
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