| http://www.w3.org/ns/prov#value | - The substrate holder 18 is urged by a spring, a magnet, a vacuum or other compliant or biasing means against the fiducial surface. i) The equivalent arrangement to h), wherein the recesses are in the substrate-holder support 19 and the projections are on the lower surface of the substrate holder 18. j) Any of the mechanisms described in b)-i) above, further including two or more through-holes in t
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