| http://www.w3.org/ns/prov#value | - hafnium oxide, lanthanum oxide, yttrium oxide, manganese oxide and the like, metal oxides such as aluminum oxide, calcium oxide, strontium oxide, barium oxide, silicon oxide and the like and composites thereof, high resistance nitrides such as silicon nitride, aluminum nitride, boron nitride, tantalum nitride and the like and composites of these oxides and nitrides, and thin film materials, for ex
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