| http://www.w3.org/ns/prov#value | - The coating solution is coated onto a substrate such as silicon wafer, metal plate, plastic plate, glass plate or the like according to known process such as spin-coating, immersion, printing, dispersing, roll coater, or the like, followed by heating the resulting material at 200??? to 500??? C., preferably 300??? to 400??? C. for several minutes to several tens hours, preferably for 0.5 to 3 hour
|
