| http://www.w3.org/ns/prov#value | - The concave portions are 0.01 to 2 ??m, preferably 0.1 to 1 ??m, in width particularly in areas where the channel formation regions are located. [0115] Then, as shown in FIGS. 9A to 9E, an oxide film or silicon oxynitride film serving as a third insulating film 901 and an amorphous silicon film are formed on the first insulating film 802 and on the second insulating film 803 in succession in the s
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