| http://www.w3.org/ns/prov#value | - The insulating film 318 can be formed to have a single-layer or layered structure of an insulating film containing oxygen and/or nitrogen, such as silicon oxide, silicon nitride, silicon oxynitride, or silicon nitride oxide; a film containing carbon such as a diamond-like carbon (DLC); an organic material such as an epoxy, a polyimide, a polyamide, polyvinylphenol, benzocyclobutene, or an acrylic;
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