| http://www.w3.org/ns/prov#value | - The protective film 180 is made of an inorganic material such as a silicon nitride and a silicon oxide, an organic material having an excellent planarization property and photosensitivity, and a low dielectric-constant insulating material formed with a plasma enhanced chemical vapor deposition (PECVD) such as a-Si:C:O and a-Si:O:F. However, in order to use excellent properties of an organic film a
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