| http://www.w3.org/ns/prov#value | - Then, as shown in FIG. 15B, a Bax Sr1-x TiO3 film 9 was deposited all over the upper surface of the device including the surface of the thin RuO2 film 15, and thereafter heat-treated in a nitrogen gas atmosphere or in an inert gas atmosphere at a temperature of 650 to 800??? C., followed by a further heat treatment thereof in an oxygen atmosphere at a temperature of 200 to 600??? C. Subsequently,
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