| http://www.w3.org/ns/prov#value | - The apparatus of claim 1, wherein said cooling station includes upper and lower gas showerheads spaced from each other, and including supports for supporting a substrate between the showerheads and spaced from the showerheads, each of said showerheads being adapted to be connected to a source of cooling gas to enable cooling gas to be projected through openings in said showerheads onto the upper a
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