| http://www.w3.org/ns/prov#value | - The inventors' studies have revealed that the particle size of dust, etc. occurring at steps in an ordinary clean room, for the most part, is 0.1 to 2 ??m, especially about 1 ??m, and that by bringing the average thickness of the multilayer dielectric layer to at least 4 ??m and especially at least 6 ??m, it is possible to bring the dielectric strength of a defective portion of the dielectric laye
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