| http://www.w3.org/ns/prov#value | - The relative elasticity of the silicon layer 32 that is thinned-down in the location of the cavity 38 (a single arm 41 in FIG. 1A, or three arms 41 in FIG. 1B), makes it possible when the pressure of the liquid in the cavity 38 is no longer greater than the pressure of the liquid in the duct 102 for the member 40 to return to its initial position as shown in FIG. 1, i.e. a position in which the me
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