| http://www.w3.org/ns/prov#value | - The substrate on which diamond film is deposited comprises a single crystal such as diamond, silicon carbide, silicon, sapphire, and similar materials; a polycrystalline material such as silicon; a metal such as tungsten, molybdenum, titanium, tantalum, copper, and the like; a mixture of metals such an tungsten and molybdenum, tungsten and copper, molybdenum and copper, and the like; a ceramic mat
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