| http://www.w3.org/ns/prov#value | - The transport frame further provides a solid hinge flexure that may provide movement in the Z-axis, and has no friction or stiction. [0015] In accordance with yet another embodiment, a method is described including the acts of directing an excitation beam at a probe array, receiving reflected intensity data responsive to the excitation beam, where the intensity data is responsive to a focusing dis
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