| http://www.w3.org/ns/prov#value | - The introduction is conformal in the sense that electrode material 206 is introduced along the side walls of insulating structures 205 and overlying isolation structure 211. [0026] In the example where electrode material 206 is semiconductor material such as polycrystalline silicon, following or during the introduction of electrode material 206, a dopant is introduced into the polycrystalline sili
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