| http://www.w3.org/ns/prov#value | - The bottom electrode pillar 12 is made using conductive materials such as titanium nitride or other conductive materials, such as TaN, TiAlNi, W, WN, silicides, SiGe, silicon carbide, ruthenium oxide, nickel oxide, iridium oxide, LaNiO3 and other metal oxides and metal nitrides, selected for compatibility with the contact surface 11 and with the phase change material 13, preferably having a resist
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