| http://www.w3.org/ns/prov#value | - A humidity sensor, and particularly a sensor which can distinguish between low humidity values, for example below 60% humidity, and high humidity values, for example 90% humidity and thereover, and change the capacitance between output electrodes (5, 6) is formed by applying interdigited comb electrodes (1, 2) on a substrate (8) and applying over the substrate a ceramic mass formed of BaRuO3, V2 O
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