| http://www.w3.org/ns/prov#value | - The method of claim 2, wherein the parameters in the vacuum chamber satisfy the following equation: .times..times..times..times..pi..times..times..pi..times. ##EQU00011## .smallcircle..perp..times..times..omega. ##EQU00011.2## where, V isan acceleration voltage applied to an electrode plate disposed in the vacuum chamber, q is a quantity of an electric charge, d is a distance between the emitter a
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