| http://www.w3.org/ns/prov#value | - The method of claim 32:further includes the step of:calculating a second maximum threshold of a second of said characteristics of said defects included in said defect data in said region to be included in a cluster of defects using said defect density in said region of interest with said region including at least a portion of at least two substrates of said plurality of substrates; and said step o
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