| http://www.w3.org/ns/prov#value | - The selected piezoelectric/electrostrictive material is applied to the substrate 2 or electrode layer 16 to form the piezoelectric/electrostrictive elements 6 or layer 14, 6a, by a thin-film forming technique such as vacuum vapor deposition, sputtering, ion-plating, cluster-ion beam process or CVD, or a coating technique such as spinning, dipping, spraying or brushing, or alternatively by a thick-
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