| http://www.w3.org/ns/prov#value | - When polycrystallization of the film is carried out by high temperature annealing process at 900-1200??? C., instead of the above-mentioned middle temperature annealing process, segregation of impurities in the film occurs due to the solid growth from nucleus, whereby impurities such as oxygen, carbon, nitrogen are increased in the GB and, although the mobility in crystal is higher, the movement o
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