| http://www.w3.org/ns/prov#value | - The diaphragm-type logical element defined by claim 1 wherein said element is a product AND element in which each of said supply ports are connected in parallel with said main supply port and wherein each of said superimposed, modular chamber defining plates has formed therein an outlet port spaced from said supply port, said outlet ports of each of said chamber de-' fining plates being connected
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