| http://www.w3.org/ns/prov#value | - This lower protection insulating film 14 a is formed to protect the capacitor dielectric films 12 a, which are ready to be reduced, from the reducing substance such as the hydrogen and to block the entering of the hydrogen into the inside of the capacitor dielectric films 12 a. [0072] By the way, if the bias voltage is applied to the silicon substrate 1 in forming this lower protection insulating
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