| http://www.w3.org/ns/prov#value | - The conductive layer (B) 115 may be formed of an element selected from among tantalum (Ta), titanium (Ti), molybdenum (Mo) and tungsten (W), or an alloy composed mainly of such an element, or an alloy film with a combination of these elements (typically a Mo???W alloy film or Mo???Ta alloy film), and the conductive layer (A) 114 may be formed of tantalum nitride (TaN), tungsten nitride (WN), titan
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