| http://www.w3.org/ns/prov#value | - hines CorporationOptical system for the projection of patterned light onto the surfaces of three dimensional objectsUS5661548 *21 Nov 199526 Ago 1997Nikon CorporationProjection exposure method and apparatus including a changing system for changing the reference image-formation position used to generate a focus signalUS569154114 May 199625 Nov 1997The Regents Of The University Of CaliforniaMaskless
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