| http://www.w3.org/ns/prov#value | - The test patterns and necessary control signals such as address signals are supplied from the tester 22a through communication cables 22k to the wafer prober 22b, and the wafer prober 22b sequentially applies the test patterns and the necessary control signals to semiconductor memories MM fabricated on a semiconductor wafer WF. The data processing unit 22c further executes program sequences for an
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