| http://www.w3.org/ns/prov#value | - When a core part of a convex shape is formed, which is then covered with a cladding part as described in the publication, since asperities are formed on the surface of the cladding part, there is a problem that when optical waveguides are accumulated in the vertical direction, the processing accuracy of a core part of an optical waveguide formed by the later step is deteriorated due to the unevenn
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