| http://www.w3.org/ns/prov#value | - The method comprises the steps of placing the substrate in a vacuum chamber having a graphite target electrode and an opposite electrode placed therein, evacuating the vacuum chamber to a predetermined pressure, introducing a gaseous mixture into the vacuum chamber to produce a gaseous atmosphere therein at a pressure ranging from 0.7 Pa to 665 Pa, the gaseous mixture includes a kind of gas mixed
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