| http://www.w3.org/ns/prov#value | - Therefore, there is a constant positional shift in the movable electrodes 24 due to the gravity along the directions Y. For example, when the sensor in FIG. 6 is mounted such that the directions Y become vertical to the ground while the lower side of the supporting substrate 11 in FIG. 6, on which electrode pads 25 a, 31 a, 41 a are located, become more distant from the ground than the upper side
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