| http://www.w3.org/ns/prov#value | - The nozzle 112 is connected to the distal end of the treating solution supply arm 110 for delivering the treating solution to the wafer W. The treating solution pipe 114 is connected at a forward end thereof to the nozzle 112, and at the other end to a treating solution source (not shown). [0006] Where the treating solution is a resist solution, for example, it is known that, depending on the temp
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