| http://www.w3.org/ns/prov#value | - The SiN film is selected on the ground that its physical properties such as strength and elastic constant are suitable for mechanical driving of the bridge member 24. [0017] When a minute voltage is impressed between the substrate-side electrode 20 and the combined light reflective film and membrane-side electrode 14 opposed to the substrate-side electrode 20, the electrostatic driving type membra
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