| http://www.w3.org/ns/prov#value | - The process parameters are process conditions, including without limitations, gas composition, gas flow rates, temperature, pressure, and gas energizer settings such as RF or microwave power levels. [0035] The process sequencer instruction set 322 comprises program code to accept a chamber type and set of process parameters from the computer readable program 320 or the process selector 321 and to
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