| http://www.w3.org/ns/prov#value | - The method, using apparatus such as described above, includes the steps where, while a group of substrates on which a film to be formed are being subjected to film forming in the film forming chamber, the loading chamber is loaded with the next group of substrates and evacuated, and the substrates onto which a film has been formed are unloaded from the unloading chamber, and is characterized in th
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