| http://www.w3.org/ns/prov#value | - Thus, there is an advantage that crystallinity is uniform (FIG. 14B). [0181] In the foregoing two techniques, instead of nickel (Ni), a catalytic element such as germanium (Ge), iron (Fe), palladium (Pd), tin (Sn), lead (Pb), cobalt (Co), platinum (Pt), copper (Cu), or gold (Au) may be used. [0182] If a crystalline semiconductor film (including a crystalline silicon film, a crystalline silicon ger
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