| http://www.w3.org/ns/prov#value | - The method of the invention is for microlithographically generating an image with polarized light including the step of providing light beams which incident in an image plane and causing the light beams to interfere to form an image in the image plane; and, imparting a polarization to the light beams to have a preferred direction of the polarization orientated perpendicular to the incidence plane.
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