About: http://webisa.webdatacommons.org/30439929

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	If the hard mask material is a conductive film, such as titanium nitride, it can be left on, if desired, to make a low resistance ohmic contact to the N+ silicon film 1314 of the pillar memory device.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com